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MEMSnet Home: MEMS-Talk: Quality inspection after anodic bonding of aluminum and glass
Quality inspection after anodic bonding of aluminum and glass
1999-07-27
markarian nikolai
Quality inspection after anodic bonding of aluminum and glass
markarian nikolai
1999-07-27
              surfaces]


 Hello All,

Does  anybody know how to inspect the bonding quality after bonding thin glass
plate and 2 micron aluminum layer deposited on silicon wafer?
Will highly appreciate any kind of information.

Thanks,



  Nikolai Markarian
  Department of Mechanical Engineering
  New Jersey Institute of Technology
  University Heights
  Newark, NJ 07102-1982
  [email protected]



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