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MEMSnet Home: MEMS-Talk: HF-Cleaning of amorphous Si.
HF-Cleaning of amorphous Si.
1999-07-30
Choelhwyi Bae
HF-Cleaning of amorphous Si.
Choelhwyi Bae
1999-07-30
Hellow.

Could you give me a advice for the amorphous Si?
I hope to know the amorphous Si is also terminated by H after HF
cleaning.
Please give me a advice if there are good book or journals.

thank you..


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