We have developed a labview application that takes the data from a
Ocean Optics Reflection Spectrometer and calculates the thickness of
tranparent films (in real time). In older fabs, this instrument is
called a Nanospec. We use it to do routine measurements of the thickness
of SiO2, SiN, and photoresist layers. With a bit of fiddling, it can be
used to measure the thickness of Si membranes.

  We are making the labview software available to whoever wants it. The
only proviso are that any use of the software fit the standard Freeware
policies (i.e. giving credit, using the software for commerical
purposes, etc). This software does not come with the ocean optics
drivers. It is only the part we wrote ourselves

  If you are interested, send me an e-mail and we will send the code to
you.

     Ken Westra
     MicroFab at the University of Alberta
     www.ualberta.ca/~microfab

PS The software was written by Michael Colgan. A Co-op engineering
student at the MicroFab