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News	MEMSnet Home: MEMS-Talk: KOH etching using Photoresist PMMA KOH etching using Photoresist PMMA 1999-02-06 ¹ÚÃ¢¹Î KOH etching using Photoresist PMMA ¹ÚÃ¢¹Î 1999-02-06 Hello, MEMS. I use PMMA as photoresist. And I want to use anisotropic etching in Silicon(110). But the PMMA is striped in KOH etchant. I use KOH, IPA, DI in etchant. Someone help me. Is the PMMA is striped in KOH etchant in general or I misuse it? Please let me know. Thank you for reading my mail. Sincerely yours. ================================================== Æò»ý ¾²´Â ¹«·á E-mail ÁÖ¼Ò ÇÑ¸ÞÀÏ³Ý http://www.hanmail.net reply
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