A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Selective etching or patterning of Parylene-n
Selective etching or patterning of Parylene-n
1999-09-07
[email protected]
1999-09-07
Kaustubh S. Gadre
Selective etching or patterning of Parylene-n
Kaustubh S. Gadre
1999-09-07
Hi,

I am working on Pa-n as a dielectric material. but cannot get any
information about patterning or selective etching of it. Can anybody
suggest any literature or personal contact?
Thnaks

Kaustubh Gadre
ASU


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Addison Engineering
Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics