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MEMSnet Home: MEMS-Talk: exposing PMMA
exposing PMMA
1999-11-26
Shay Kaplan
exposing PMMA
Shay Kaplan
1999-11-26
Dear Jolyn,
PMMA can be pattrened by using UV light (248nm). it acts as a negative
resist and can be developed in Xylene.

Shay Kaplan


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