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MEMSnet Home: MEMS-Talk: PR Adhesion issue for AU-plating
PR Adhesion issue for AU-plating
1999-12-05
allmmic
PR Adhesion issue for AU-plating
allmmic
1999-12-05
Dear Sir ,

    I have one problem , I use AZ1500-90 on 3"wafer that has thin Au
film on the
    surface for Au-plating . I must plate 2um. but Au will plate into
the intrface
    between PR and wafer. I think that is PR adhesion problem. Does
anyone
    know how can solve this problem. thank you very mush .

    Jackie Huang


reply
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