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MEMSnet Home: MEMS-Talk: Re: Maximum current densities for Ti and Pt.
Re: Maximum current densities for Ti and Pt.
1999-12-06
Kai Hiltmann
Re: Maximum current densities for Ti and Pt.
Kai Hiltmann
1999-12-06
Li Tongshi, ni hao,

sorry, my Chinese is not he best. I have used gold on 30 nm chromium as a
metallization and found the following values
Thickness       100 nm: I/A <= 40 ... 70 kA/mm^2
                200 nm: I/A <= 30 ... 50 kA/mm^2
                500 nm: I/A <= 14 ... 40 kA/mm^2
                1000 nm: I/A <= 6 ... 20 kA/mm^2

Above these levels, increased interdiffusion will set in with considerable
increase in resistance and consecutive failure.

Yours sincerely, Kai Hiltmann

Kai Hiltmann, HSG-IMIT, Wilhelm-Schickard-Str. 10, D-78052
Villingen-Schwenningen, Germany
Ext. ++49-7721-943-132, Fax ++49-7721-943-140

PS: As you may have noted, I have picked your second mail address!

Hi, everyone:
  Now we are developing gas sensor and we want to use
Ti and Pt as the heater, but we don't know the maximum
current densities for them. If you know them, you are expected
to tell us.
  Any help will be appreciated. You can contact me by the
E-mail:
  [email protected]
  [email protected]
  Thanks again.

Sincerely,
Li Gang


reply
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