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MEMSnet Home: MEMS-Talk: Re: Better resolution for desktop publishing masks
Re: Better resolution for desktop publishing masks
1999-02-05
Ashutosh Shastry
1999-02-05
Mark Bachman
1999-02-05
Ji Fang
1999-02-05
Ashutosh Shastry
1999-02-09
Ashutosh Shastry
1999-02-05
[email protected]
1999-02-08
Amit Shiwalkar
Re: Better resolution for desktop publishing masks
Ashutosh Shastry
1999-02-05
You could use IR printer which has a resolution of more than 10000 DPI.
Offset Printers who make the master copy usually have this printing
facility.

With this we at I.I.T. Bombay have been regularly using this technique for
mask making and getting reliable results upto 5 microns.

Wish you all the best.

-Ashutosh Shastry-

On Thu, 4 Feb 1999, John R Lodmell wrote:

>       I have recently used a commercial printer to make a mask on printer's
> film.  He used a Linotronic printer with 2540 dpi.  The mask gave us about 25
> micron resolution, which I understand is pretty typical.
>       I would really like about 10 micron resolution, but our
> photolithography system does not have reduction capability (only 1:1).  Does
> anyone know how to get closer to 10 microns?  Try to find higher dpi
> capabilities?  Commercially available reduction to make a new mask from the
> existing mask?
>       Any suggestions would be appreciated.
>
> John Lodmell
> [email protected]
>
>

================================================================================
        Ashutosh Shastry                Graduate Student,
        #30, Vihar House, IIT,          School of Biomedical Engineering,
        Powai, MUMBAI-76.               I.I.T. Bombay.

        Microlelectronics Staff Room,  Phone/Fax: 578 3655 or 5782545 extn 8471
        EE Dept., I.I.T. BOMBAY.        Fax: 579 3707

===============================================================================
        Dream as if you will live forever
                                          Live as if you will die today.
================================================================================


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