Could any expert tell me how to dry etch vanadium oxide VO2 film(300A) on
top of 750A Alunminum. Underneath Aluminum is 1200A PECVD SiO2, the dry
etch method should not hurt the SiO2 film. I tried to use CHF3+O2 RIE
etch, but it did not work.

Appreicate any solution and suggestion.

Changqing zhan