Does anyone know wet etching for Si3N4 with mask of photoresist or PMMA
or Polyimide?
Or some place which I can use a RF-plasma etching in D.C. metro area?
Thanks,
============================================
Kiyotaka Mori (Graduate Student)
Dept.of Materials and Nuclear Engineering,
BLDG.090,
University of Maryland at College Park,
College Park, MD 20742
Tel: 301-405-5229
Fax: 301-314-9467
E-mail: [email protected]
