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MEMSnet Home: MEMS-Talk: HMDS on metals
HMDS on metals
1999-02-16
Todd Green
HMDS on metals
Todd Green
1999-02-16
Is HMDS useful as a resist adhesion promoter on substrates other than
silicon? We use HMDS before applying resist to a gold coated wafer and I
was wondering if this would have any benefit on gold-resist adhesion.

Thanks,


Todd


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