The best experts I can think of in MEMS are prof. Stephen Senturia from MIT
and Richard Muller from UC, Berkeley.  These two academic units are the most
advanced in MEMS arena. Other good universities in this filed would be
Carnegie Mellon University (prof. Gary Fedder) and Georgia Institute of Tech.
(prof. Mark Allen) and Stanford University (prof. Kovacs).

Best regards,

Andrzej Prochaska