Dear Memsers,

Here are the responses about 6" low-stres nitride coating service.  I was
looking for a US supplier, but thought that it'll be useful if all get to
know who can do it out there.

     Cornell (www.cnf.cornell.edu) is bringing the process up.
     Penn State (www.emprl.psu.edu) has a process with undefined stress
level.
     UC Santa Barbara (www.nanotech.ucsb.edu) has a PECVD process with
undefined stress level.
     MCNC (mems.mcnc.org) is currently qualifying their process.
     IMEC (www.imec.be) has wafer lines at 6" (upgrading to 8").
     IBMT (www.ibmt.fhg.de) has a PECVD process with defined (unspeicified)
stress.
     Polishing Company of America (www.pcasilicon.com) outsources: LPCVD @
1 GPa and PECVD @ -400 MPa.
     Virginia Semiconductor (www.virginiasemi.com) outsources: "high"
stress.

Barry Chen
Sr. Research Engineer, ATMI
voice (203) 794-1100
fax (203) 830-4116