This is a very interesting subject. I have seen an optical system doing
static measurement (z-axis). An interferometer will surely be great help.
But it may not give you high frequency response. I would like to follow up
on this issue with you.

Best regards,
David C.K. Ng
Research Officer, IMRE


> -----Original Message-----
> From: John Neumann [SMTP:[email protected]]
> Sent: Friday, February 12, 1999 1:20 AM
> To:   [email protected]
> Subject:      interferometers
>
> Does anyone know if there is a type of interferometer that would
> interface to an existing microscope? We have a porbe station we
> like, and it would be useful to measure z-direction vibrations at
> various points on the structures we look at.
>
> Thanks,
> --
>
> %%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%
>
> Dr. John Neumann
> Postdoctoral Researcher, ECE Dept.
> Micro-electro-mechanical Systems (MEMS)
> 1209 Hamerschlag Hall
> Carnegie Mellon University
> Pittsburgh, PA 15213-3890
>
> [email protected]
> phone: (412) 268-4404
> FAX: (412) 268-2860
>