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MEMSnet Home: MEMS-Talk: RE: Thick Resists for Au plating
RE: Thick Resists for Au plating
1999-02-15
Ramadas, Padmaja
1999-02-10
Ramadas, Padmaja
1999-02-10
Sanjay Dhar
1999-02-15
Ramadas, Padmaja
1999-02-15
Shekhar Bhansali
1999-02-19
Yohannes
RE: Thick Resists for Au plating
Yohannes
1999-02-19
>
>AZ 4620 is regularly used for Cu and Au plating in 25 micron application.
>> ----------

I have tried AZ4620 with a basic (pH 10) gold sulfite solution.  The resist
is attacked by the high pH solution.  If you plan to use AZ4620, I recomend
plating at a slightly lower pH... 8.5 or so.  AZ4620 can be easily removed
using a solvent or even full strength developing solution.

Regards,
Yohannes


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