Hi Robert

Have you considered Oxford Instruments DP80 or DP800 systems?  These are
plasma enhanced chemical vapour deposition systems, either running at
13.56MHz or using mixed frequency (to achieve stress control).  Try the web
site at http://www.oxfordplasma.com for your nearest agent or company site.
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Plasma Technology, Oxford Instruments
North End, Yatton
Bristol, BS49 4AP, England
Tel: +44 (0)1934 833851 Fax: +44 (0)1934 834918
URL http://www.oxfordplasma.com/
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