Dear Mark,

A commercial system has been developed and is currently available from
Surface Technology Systems (STS), with US headquarters in the SF Bay
area.  Ask for Andy McQuarrie.  Their US phone number is +1 650 569
3655.  I have worked with them in the past, and I was very impressed
with the results.  Good Luck.

Thor Osborn, Ph.D.
Manager, MEMS Processing
Microvision, Inc.
2203 Airport Way South, Suite 100
Seattle, Washington 98134

TEL.    (206) 623-7055 (Main Office)
TEL.      (206) 685-6649 (Fab Office)
FAX     (206) 467-8120


-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Friday, February 19, 1999 6:24 PM
To: [email protected]
Subject: Supplier of XeF2 etching equipment?


Dear MEMS group,

We would like to do some Xenon Diflouride etching on silicon. Before we
build an etching station from scratch, I wonder if anyone knows of a
manufacturer or vendor who supplies such a station.

Any help will be appreciated.

-Mark Bachman.

--------------------------------------------
Mark Bachman, Ph.D.
[email protected] / 949-824-6421 (-3732 fax)
Research Physicist, Microsystems Engineering
University of California at Irvine