1. Modelling of the Q-factor in microaccelerometer is extremely
complicated because it depends on the design of your microaccelerometer
and also the environment condition (high or low pressure range).
Normally, an experiment is conducted to estimate the Q factor by
measuring the harmonic response of the sensor and from the response
plot, the Q factor can be derived based on 3-dB drop from the natural
frequency. You might find this book titled "Sensors, A Comprehensive
Survey: Mechanical SensorsVolume 7" by H.H.Bau et. useful for your
project.

2. Definitely, a Q high factor, the lower the damping, and the better
the response for your accelerometer. But vacuum packaging might be a bit
expensive and the cost is always a strong factor to consider.

Rgds
KokWah

Xu Jun wrote:

> Hello!
>
> I want to know the following answers:
>   1. how to calculate Q factor in a capacitive microaccelerometer?
>   2. the higher Q factor,the better performance of device?
>
> regards
> xu jun
>