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I am using a boron etch stop to build a hinge on silicon. What is the
best anisotropic etchant to use. I am considering KOH, TMAH, EDP, etc.
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Steve Forgrieve
Department of Electrical Engineering
The University of Edinburgh
King's Buildings
Mayfield Rd
Edinburgh EH9 3JL
(Int +44) 131 650 5665 (enquiries)
email: [email protected]
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I am using a boron etch stop to build a hinge on silicon. What is the best
anisotropic etchant to use. I am considering KOH, TMAH, EDP, etc.
--
Steve Forgrieve
Department of Electrical Engineering
The University of Edinburgh
King's Buildings
Mayfield Rd
Edinburgh EH9 3JL
(Int +44) 131 650 5665 (enquiries)
email: [email protected]
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======== Fwd by: Kavita Chandr ========
I have used KOH very successfully with Boron Etch Stop. Works very well.
Kavita Chandra
MEMS Design Engineer
Wilcoxon Research Inc.
(301)216-3032 -voice
(301) 330-0743 -Fax
