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MEMSnet Home: MEMS-Talk: Grating mask
Grating mask
1999-03-02
Hua-Tang Chen
Grating mask
Hua-Tang Chen
1999-03-02
Hi,
    This is my first message in the group discussion.  How's everybody?

I have some questions about the grating mask, which is a mask whose
pattern is containing at least 10,000 lines/mm.
Does anyone have information about who can fabricate this kind of mask?
What is the highest frequency can be made and how much does it cost?  Is
it possible to have cross lines or circular dots instead?
Thank you for your information.


Hua-Tang Chen
[email protected]
3536 Engineering Building
Dept. of Materials Science and Mechanics
College of Engineering
Michigan State University
East Lansing, MI 48824


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