Hello!

Here's a summary of responses to my original question of designing a
micro-mirror with a deflection angle of 40 to 45 degree.

1. Use polymers as the hinge material
2. Increase hinge length by using folded or coiled hinge
3. Design a hinge that are able to rotate freely.

Since we are using one kind of polymer as the sacrificial layer, the first
solution is likely to complicate the fabrication process too much. We are
going to investigate the feasibility of the second and third solutions. I
will keep you posted with the progress. In the meantime, any other solutions
are welcome!

I would like to acknowledge the following persons who have responded to my
email.

Franck Chollet
Rob Conant
Jarlath McEntee
Mark Wendman
Huaping Xu

Thank you all! You've been most helpful.

Regards

Rose Zhang
Photonics Materials & Processes
Nationa Optics Institute
369 rue Franquet, Ste-Foy
Que, Canada
Tel: (418)657-7406x506
Fax:(418)657-7009