Yes. We have done some work on free-space micro-optical systems. What
process and design rule you have? and actually two or three polysilicon
should be doing very well 3-D mirror. Do you have the 3 layers polysilicon
process?

Regards

Aiqun

______________________________________________________________
AIQUN LIU  Ph.D
Senior Research Fellow, MEMS Technology
INSTITUTE OF MATERIALS RESEARCH & ENGINEERING
Blk S7, Level 3
National University Of Singapore
SINGAPORE 119260

Tel: (65) 8748161
Fax: (65) 8720785
email: [email protected]
_________________________________________________________________________


> -----Original Message-----
> From: Rose Zhang [SMTP:[email protected]]
> Sent: Friday, March 05, 1999 10:44 PM
> To:   [email protected]
> Subject:      MEMS: micro-mirror
>
> Hello!
>
> We are trying to design a micro-mirror with a deflection angle of 40 to 45
> degree. However, if we use torsion hinge, the stress of the hinge at 45
> degree exceeds the yield strength of most materials. I wonder whether you
> have any suggestion about what materials and what hinge types are best
> suitable for this kind of application.
>
> Your help would be greatly appreciated.
>
> Rose Zhang
> Photonics Materials & Processes
> Nationa Optics Institute
> 369 rue Franquet, Ste-Foy
> Que, Canada
> Tel: (418)657-7406x506
> Fax:(418)657-7009
>
>