Hello !

You can check some papers authored by Hiroshi Toshiyoshi from the University
of Tokyo, he realized a micro-mirror with a deflection angle of 90 degrees
and the reliability of the device was quite good.

You should not only consider the yield strength of the material but as it is
a torsion problem, the length of the hinges is an important parameter.

Lionel

Rose Zhang wrote:

> Hello!
>
> We are trying to design a micro-mirror with a deflection angle of 40 to 45
> degree. However, if we use torsion hinge, the stress of the hinge at 45
> degree exceeds the yield strength of most materials. I wonder whether you
> have any suggestion about what materials and what hinge types are best
> suitable for this kind of application.
>
> Your help would be greatly appreciated.
>
> Rose Zhang
> Photonics Materials & Processes
> Nationa Optics Institute
> 369 rue Franquet, Ste-Foy
> Que, Canada
> Tel: (418)657-7406x506
> Fax:(418)657-7009
>



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LIONEL BUCHAILLOT
IEMN / Dpt ISEN
Silicon Microsystems
CITE SCIENTIFIQUE
AVENUE POINCARE - BP 69
59652 VILLENEUVE D'ASCQ CEDEX
Phone : +33 3 2019-7838
Fax : +33 3 2019-7884

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