You might contact CIS at Stanford Univ.. I believe they have the recipe.

Ying Xu
MEMS Applications Engineer
Tanner Research Inc.
2650 E. Foothill Blvd.
Pasadena, CA 91107
phone: (626)-685-5930
fax: (626)-432-5705


-----Original Message-----
From: Shekhar Bhansali [mailto:[email protected]]
Sent: Monday, March 08, 1999 6:28 AM
To: [email protected]
Subject: LPCVD oxide deposition


We would like to get low stress LPCVD oxide deposited on 4 2-inch
micromachined wafers.  I'd be happy to pay for the service.

I and my student have already tried to reach MCNC with no luck (We've left
plenty of voicemails but no one has returned the calls.....yet).

Thanks
Shekhar Bhansali, Ph.D.
Center for Microelectronic Sensors and MEMS
Department of Electrical & Computer Engineering and Computer Science
University of Cincinnati
Cincinnati OH 45221-0030
Phone: (513) 556 0903  Fax: (513) 556 7326