Dr Paneva

To the best of my knowledge no specific reliability and long-term stability
standards, models, test methods for MEMS really exist beyond an early test
stage.  You might be able to find data on specific products by that products
manufacturer.  The data you get might not be exactly right for your utilization
of MEMS though.  For example I am currently working on the integration and use
of MEMS in a military environment.  Reliability data does not exist, especially
life cycle data.  We are kind of testing while we integrate and relying on
accelerated aging for help in determining if MEMS can withstand a military
environment.

For a start you might want to contact Sandia National Laboratories.  I can't
remember their email but a search through the internet should get you some help.
 They are currently doing some testing into MEMS reliability.

____________________Reply Separator____________________
Subject:    MEMS reliability and long-term stability
Author: "Dr. Roumiana Paneva" 
Date:       3/24/99 1:07 PM

Hello All,

I'm looking for MEMS' specific reliability and long-term stability
standards, models, test methods and experimental results. Bulk
micromachined sensors with anodic or fusion bonded wafers (acceleration
sensors, pressure sensors) are from special interest. Any informations and
suggestions will be deeply appreciated.

Sincerely,
Roumiana

        Dr. Roumiana Paneva

        X-FAB GmbH
        Haarbergstasse 61
        D-99097 Erfurt
        Deutschland
        Tel: (+49) 361 42 053 21
        FAX: (+49) 361 42 053 11


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From: "Dr. Roumiana Paneva" 
Subject: MEMS reliability and long-term stability
To: [email protected]
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