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MEMSnet Home: MEMS-Talk: Parylene Adhesion to Si
Parylene Adhesion to Si
1999-03-26
Arbuckle, Brian
Parylene Adhesion to Si
Arbuckle, Brian
1999-03-26
We are trying to coat Parylene N and C on Si wafers.  In particular, we are
concerned with the adhesion between the two materials.  Are there any proven
process(es) that will maximize the adhesion?

Thanks,
Brian W. Arbuckle


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