A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Hi Guys, could you tell me what the density of LPCVD polysilicon
Hi Guys, could you tell me what the density of LPCVD polysilicon
1999-04-20
Dung-An Wang
Hi Guys, could you tell me what the density of LPCVD polysilicon
Dung-An Wang
1999-04-20
Dear MEMS people
Could you tell me what the density of LPCVD polysilicon is ?
I much appreciate that.
Have a good day.



   Sincerely,
          Dung-An

Phone:
 Office: (734) 615-0303   Home  : (734) 662-1553
Address:
 Office:                               Home:
  University of Michigan                  411 Longshore Dr.
  Department of Mechanical Engineering    Ann Arbor, MI 48105
  3007 EECS, 2350 Hayward                 U.S.A.
  Ann Arbor, MI 48109-2125
  U.S.A.
E-Mail:
   [email protected]
Homepage:
   http://www-personal.engin.umich.edu/~wangd


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Process Variations in Microsystems Manufacturing
The Branford Group
MEMS Technology Review