Dear MEMS collegues:
I research the bibliography concerning a general characterisation of
MEMS reliability (parameters to measure/measuring techniques) based on
1. Improving of the design
2. Diagnostics during the manufacturing:
3. Diagnostics during the use.
Does anyone know the publications or web adresses to extract these
informations ?
Thank you very match;
Best regards
C. Gorecki

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Dr. Christophe Gorecki, CNRS Senior Researcher
Laboratoire d'Optique P.M. Duffieux, Faculte des Sciences et Techniques
16 route de Gray, 25030 Besancon, France
Tel: +33-3-81666594, fax: +33-3-81666423
e-mail: [email protected]