Dear MEMS Discussion Group;

My company designs and manufactures analytical instrumentation for the
analysis of ionic contamination.  It would be helpful to us to obtain the
answers to the following questions so that we can better address the needs
of the MEMS market for chemical and microcontamination issues.

I am looking for a list of the liquid chemicals that are used in MEMS
manufacturing, including types of plating baths (if applicable).  Do these
chemicals need to be the same purity as used in the Semiconductor industry?

In a typical MEMS manufacturing process (if there is such a thing) are there
microcontamination issues for ions such as chloride and sulfate.  If so, are
these issues of the magnitude experienced in the Semiconductor industry or
lessor/greater?

Thank you for any help you can supply.