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MEMSnet Home: MEMS-Talk: Deposition of piezo material
Deposition of piezo material
1999-04-22
Fulvio
Deposition of piezo material
Fulvio
1999-04-22
Hi:
does someone of you know something about pPiezoelectric material deposition on
Silicon ?

Can you indicate me some leterature concerning the argument ?

Thank you in advance

Best regards

Fulvio Boattini

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Fulvio Boattini
ABB Ricerca S.p.a.
Electrical Engineer
Fax +39 0226232188
Tel +39 0226232037
E-mail: [email protected]
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