Dear MEMS fanatics,

I'm looking for any suggestions that can help me to measure the
displacement of one of my gyro test structures which can only be actuated
to 1 or 1.5 micron maximum. For your information, this test structure is
fabricated for direct observation test purpose only and not to be used
with any electronic interface or devices. Currently, I'm trying to view
the displacement on a PC monitor by using microscope equipped with a
digital camera. Unfortunately, the software I used has a resolution of 1
micron and this make my measurement difficult to observe. Any suggestions
will be highly appreciated. Thank you.

Leow Kok Wah
Nanyang Technological University of Singapore
School of Mechanical and Production Engineering
(Research Graduate Student)