A chrome etch is available from Transene Corporation in Danvers
MassachusettsUSA.  You can get phone number by dialing information 1
9785551212 and ask for the company.  Good luck.


-----Original Message-----
From: David Menche 
To: [email protected] 
Date: Wednesday, May 12, 1999 6:03 PM
Subject: Chrome etch


>
>  We are using chrome as a hard mask to dry etch SiO2.
>What is a good chrome echant that will not attack the photo resist, nor
>SiO2, and what kind of etch rate is expected.   tried potassium
>permaginate/potassium hudroxide solution, and find it is very slow at
>chrome etch, and fast at dissolving the resist.
>
>thanks    dave menche
>