As usual, the [email protected] mailing list has come through. I would like
to thank all the people who contacted me, there are too many to thank
individually. I will post a summary of the e-mails and my research on
the LPCVD/Furnaces needed for surface micromachining, when I have a
chance to digest the information. (this could take a couple of months)
Ken Westra
Director, MicroFab
University of Alberta