Hi all,
I am currently interested in wet etching approximately 1-2 microns of
polyimide (Dupont PI2545), which I use as a sacrificial layer in MEMS
applications. A fast, dry etch tends to generate stress in the
structural layers, and hence we seek a method of slowly and gently wet
etching polyimide. If anyone has previously done this, or knows of an
etch recipe/product I can use for this purpose, I would like to hear
from you.
Any help would be greatly appreciated.

Regards,

Conor O'Mahony


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Conor O'Mahony
Transducers Group
National Microelectronics Research Centre (NMRC)
Lee Maltings, Prospect Row, Cork, Ireland.

Tel: +353 21 904112   E-mail: [email protected]
Fax: +353 21 270271   WWW: http://www.nmrc.ie
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