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MEMSnet Home: MEMS-Talk: Ni compatible Cu etchant and vice versa
Ni compatible Cu etchant and vice versa
2000-01-07
Nimit Chomnawang
Ni compatible Cu etchant and vice versa
Nimit Chomnawang
2000-01-07
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Dear all,

I have an electroplated thick structure (20 - 200 microns) containing Ni =
and Cu on the same substrate.=20

Does any body know the following etchants:

1. Cu compatible Ni etchant (etches Ni but does not attack Cu).
2. Ni compatible Cu etchant (etches Cu but does not attack Ni).

Any help are really appreciated.

Sincerely,

Nimit Chomnawang
Louisiana State University
[email protected]

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Dear all,
 
I have an electroplated thick structure (20 = - 200=20 microns) containing Ni and Cu on the same substrate.
 
Does any body know the following = etchants:
 
1. Cu compatible Ni etchant (etches Ni = but does=20 not attack Cu).
2. Ni compatible Cu etchant (etches Cu but does = not attack=20 Ni).
 
Any help are really=20 appreciated.
 
Sincerely,
 
Nimit Chomnawang
Louisiana State = University
[email protected] ------=_NextPart_000_0005_01BF589A.72BC1580--
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