Hello All,
Can anybody give me a successfully tested recipe for KOH etching of Silicon
with minimum SiO2 etching?
Thanks in advance,
Behraad Bahreyni
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Behraad Bahreyni
Material Research Laboratory
Department of Electrical and Computer Engineering
The University of Manitoba
15 Gillson Street
Winnipeg, Manitoba
Canada R3T 5V6
Tel: +1-(204)-2698792
email: [email protected]
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