I solicit help from the MEMS community.

I am looking for an article entitled "The Design of Electrostatic Linear
Microactuator Based on the Inchworm Motion" by Seung-Ki Lee and Masayoshi
Esashi, Department of Electrical Engineering, Dankook University, Soul, Korea
and Department of Mechatronics and Precision Engineering, Tohoku University,
Sendai, Japan.

Thanks for your help.

For background information about my request.

I am writing my thesis on the subject of Electrostatic x-y precision drives for
large ranges of motion (modelling, shaping, and realization). I am doing this
work at the Technical University of Ilmenau, Dept. of Mechanical Engineering,
D-98684 Ilmenau (Germany). My thesis presents completely designed electrostatic
drives for linear and planar motions. Calculations are made on the basis of the
finite element method and are the important basis for the optimization of the
drives. I am very interested in contacts about the set of problems for
electrostatic drives!!!

Yours sincerely,

Mr. Detlef Riemer

[email protected]