Dear everybody,
our company would like to outsource the following tasks on a rather small
number of 4" wafers:
1) APCVD Ozone/TEOS (for dielectric layers in DRIE etched cavities)
2) CVD parylene (same application)
3) CVD metal, platable, e. g. Cu (for metal layers on the above
dielectrics).
Does anybody know of organizations (companies, institutes) that provide
these services?
Any help is appreciated.
Regards,
Matthias Heschel, PhD
Manager of Operations
Hybrid Microtechnologies ApS
Ørsteds Plads, Bldg. 345 East
2800 Kgs. Lyngby
Denmark
Phone: +45 4525 6308
Fax: +45 4588 7762
Email: [email protected]