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MEMSnet Home: MEMS-Talk: Foturan etchrates
Foturan etchrates
2000-10-31
Dekker, R. (Ronald JDSU)
Foturan etchrates
Dekker, R. (Ronald JDSU)
2000-10-31
Hi there MEMS people,

Can anybody tell me something more about the etchrates
of Schott Foturan photosensitive glasses? On their homepage
they mention that the etchrate of the UV exposed parts is 20 times
as high as the unexposed parts, but then I still don't know the
absolute etchrates as function of HF concentration.
Thanks again...

Ronald Dekker.       <<< [email protected]
  >>>

JDS Uniphase Photonics cv
Velperweg 76
P.O. Box 9300
6800 SB Arnhem
The Netherlands

tel: +31-26-3662753
fax: +31-26-3665720


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