Dear MEMS Community,

I am looking for information on freeze drying equipment which can be used
for 4 inch wafers (i.e. CO2 freeze drying system). Does anyone know who
sells such commercial systems or where I can get more information on such
systems? Or if anyone uses such a system set-up for research purposes (i.e.
a 'home-made' freeze drying system) I would be interested in being in
contact with you. Any information would be greatly appreciated.

Thank you in advance,

Jessica Melin


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   Jessica Melin
   Royal Institute of Technology
   Department of Signals, Sensors and Systems
   Instrumentation Laboratory
   Osquldas väg 10, 5th floor
   SE-100 44 Stockholm, Sweden

   Phone:               +46 (0)8 790 9231
   Fax:                 +46 (0)8 100858
   Mobile:              +46 (0)73 944 3031
   Email:               [email protected]

   Homepage:         http://www.s3.kth.se/instrlab
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