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MEMSnet Home: MEMS-Talk: Si Beam Stress
Si Beam Stress
2000-11-02
Jerome Hauden
Si Beam Stress
Jerome Hauden
2000-11-02
Hi,
I am fabricating suspended masses on silicon. These masses are attached
to the Silicon substrate with beam (like in accelerometers).

Does anyone knows a formula giving the stress occuring in a beam due to
the displacement of the mass ? I would appreciate a formula including
the geometry of the beam (width, height and length),

Many thanks

Jerome


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