So far, I've got only one respond on dry-developing resist:

Does anybody have experience with dry developing resist polymers (e.g.
thermally labile or some other radiation induced mechanism)? If so, could
you please forward me the vendor information. All the replies will be
gathered and posted here.

levent

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Hi Levent,
There was a process called DESIRE which consisted of using regular positive
resist, usually with high dye content. only the top of the resist was
exposed
and the exposed layer was reacted with HMDS. the resist was then dry etched
using the exposed layers as an etch mask.
Try Olin, Shieply, or AZ - they should have material on this.
Shay Kaplan

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