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MEMSnet Home: MEMS-Talk: Help with BJD-1800 Edwards evaporator
Help with BJD-1800 Edwards evaporator
2000-11-28
Yohannes Desta
Help with BJD-1800 Edwards evaporator
Yohannes Desta
2000-11-28
We have an Edwards Temscal BJD-1800 evaporator that we
routinely use to deposit Au and Cr. We'd like to start
using it for Ti and Cu but we don't have the programs
(rise, soak, power, etc.). I contacted BOC (the parent
company of Edwards) several times with no avail. If
anyone has the programs for Ti and Cu, would you
please email them to me.

Thanks in advance.

Yohannes M. Desta
Center for Advanced Microstructures and Devices
Louisiana State University

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