Dear Mems Researchers,

I am looking for a negative resist
for e-beam lithography (50keV) with high resolution.
The kind of patterned i want to be able to reach
are 1D lattices of 100nm period.

1-) Does this kind of resist exists commercially ?
2-) Do you know where can i buy it ?

Thanks a lot

Best Regards,

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David Peyrade
Ph.D. Student
L2M-CNRS
196 Av. H. Ravera
922225 Bagneux
FRANCE

Tel: 01 42 31 73 74
Fax: 01 42 31 73 78
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