Please can someone suggest a suitable coating to protect Si from scratches.
A simple resist does not seem to do the job. We have treid s1818. The
suggested coating should be resistant to KOH.
Thanks
Asif Aziz
[email protected]
Asif Aziz
Department of Physics and Astronomy
Kelvin Building
University of Glasgow
University Avenue
Glasgow
G12 8QQ
Tel. no. +44 141 339 8855 extn 0896
