Hello, everybody!

I need a couple of custom phase masks etched on a
high-quality quartz/glass substrate.
The patterns are periodic (period of approx 40 x 40 microns
in x and y) and they have
features (square pixels) that are 10 x 10 microns.  The etch
profile would have two etch
levels.  The accuracy of the etch depth would have to be
better than 20 nm.  The features,
or etched pixels, are very sparse (two etched pixels on a 40
x 40 micron area).  The overall
size of the pattern is around 10 x 10 mm.

I also need a chrome mask on a high-quality quartz/glass
substrate.  It consists of an array
of 10 micron diameter holes spaced at 40 microns both in x
and y directions.

I tried this before and the best quote I got was for about
$16,000 per mask, which goes way
over our budget.  Can you suggest any foundries/companies
that you think can do the
job for us at a better price?

Thank you for your help.
Best regards,
Remy


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Remy Tumbar, Ph.D.

Coordinated Science Laboratory
University of Illinois at Urbana-Champaign

1308 West Main Street
Urbana, IL 61801-2307

e-mail: [email protected]
phone: (217) 333-4801
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