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MEMSnet Home: MEMS-Talk: Stress of Gold Film
Stress of Gold Film
2001-05-14
Dinh Ton
Stress of Gold Film
Dinh Ton
2001-05-14
I am looking for some information regarding
controlling
stress of Gold film (or Ti/Au film) on silicon.  If
you have a source for it, please let me know.

Thanks.

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