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MEMSnet Home: MEMS-Talk: Diffusion Data for Hydrogen...
Diffusion Data for Hydrogen...
2001-06-04
Thomas Wich
Diffusion Data for Hydrogen...
Thomas Wich
2001-06-04
Dear You,

I am desperately looking for Diffusion Data of Hydrogen in various
materials. The Materials should act as a diffusion barrier against hydrogen
on silicon.
I have already researched the Landolt-Bornstein series, but still looking
for alternative data on various materials. Especially if somebody can
provide data on Silicon-Oxy-Nitrides (including process data) I would be
very gratefull.

Thank You,

Tom


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