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MEMSnet Home: MEMS-Talk: Backside wafer alignment & sawing without polishing
Backside wafer alignment & sawing without polishing
2001-02-10
Dean Eshleman
Backside wafer alignment & sawing without polishing
Dean Eshleman
2001-02-10
Has anyone had success in finding/developing a dicing saw with a vision
system that can see through the backside of the wafer onto the surface
circuitry for alignment purposes WITHOUT having to backpolish the wafer?

I have seen standalone vision tests done using IR on a 740µm thick wafer
with slightly grainy results, but good enough for a human to decipher.
1) Are there any better vision solutions out there? or
2) Is there imaging software that can take grainy results and process it in
a way suitable for automatic alignment/pattern recognition on a dicing saw?

Your advice/experience is much appreciated,
Dean R. Eshleman


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